{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"fn": "Nicholas Ritchie", "hasEmail": "mailto:nicholas.ritchie@nist.gov"}, "description": "Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV.  Scripts for processing this data.  Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.", "distribution": [{"description": "The read_me file associated with this data set.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2975/2975_README.txt", "format": "Text", "mediaType": "text/plain", "title": "READ_ME"}, {"description": "X-ray spectra and scripts in a zip file", "downloadURL": "https://data.nist.gov/od/ds/mds2-2975/STEMinSEM.zip", "format": "ZIP Archive File", "mediaType": "application/zip", "title": "STEM-in-SEM dataset"}], "identifier": "ark:/88434/mds2-2975", "issued": "2023-05-19", "keyword": ["Quantitative electron-excited X-ray microanalysis", "energy-dispersive spectrometry (EDS)", "STEM-in-SEM", "NIST DTSA-II software", "bulk standards", "thin films", "thickness"], "landingPage": "https://data.nist.gov/od/id/mds2-2975", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2023-04-04 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Materials:Materials characterization", "Materials:Ceramics", "Materials:Composites", "Materials:Metals", "Materials:Superconductors"], "title": "Data and scripts associated with \"Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards\""}